Chemical Vapour Deposition of AIN-Si3N4 Codeposits
نویسندگان
چکیده
منابع مشابه
Transmission Electron Microscopy Studies of (AIN-Si3N4) Codeposits Obtained by LPCVD
Several (Al,Si,N) compounds have been obtained by LPCVD in a vertical hot-wall reactor using aluminium trichloride, silicon tetrachloride and ammonia as source gases, with nitrogen as the carrier gas. In order to determine both their structure and local chemical composition, several deposits have been examined by analytical transmission electron microscopy combining electron diffraction (ED), h...
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ژورنال
عنوان ژورنال: Le Journal de Physique IV
سال: 1995
ISSN: 1155-4339
DOI: 10.1051/jphyscol:1995593